Lionel Buchaillot
Lionel Buchaillot
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Gallium nitride as an electromechanical material
M Rais-Zadeh, VJ Gokhale, A Ansari, M Faucher, D Théron, Y Cordier, ...
Journal of Microelectromechanical Systems 23 (6), 1252-1271, 2014
Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film
I Roch, P Bidaud, D Collard, L Buchaillot
Journal of Micromechanics and Microengineering 13 (2), 330, 2003
Silicon nitride thin films Young's modulus determination by an optical non destructive method
L Buchaillot, E Farnault, MH Fujita
Japanese journal of applied physics 36 (6B), L794, 1997
Electrostatic actuated micro gripper using an amplification mechanism
O Millet, P Bernardoni, S Régnier, P Bidaud, E Tsitsiris, D Collard, ...
Sensors and Actuators A: Physical 114 (2-3), 371-378, 2004
Modeling the melting enthalpy of nanomaterials
G Guisbiers, L Buchaillot
The Journal of Physical Chemistry C 113 (9), 3566-3568, 2009
Universal size/shape-dependent law for characteristic temperatures
G Guisbiers, L Buchaillot
Physics Letters A 374 (2), 305-308, 2009
Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm
M Gaudet, JC Camart, L Buchaillot, S Arscott
Applied Physics Letters 88 (2), 2006
The stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions
AS Rollier, B Legrand, D Collard, L Buchaillot
Journal of Micromechanics and microengineering 16 (4), 794, 2006
In-plane silicon-on-nothing nanometer-scale resonant suspended gate MOSFET for in-IC integration perspectives
C Durand, F Casset, P Renaux, N AbelÉAbele, B Legrand, D Renaud, ...
IEEE Electron device letters 29 (5), 494-496, 2008
Size and shape effects on creep and diffusion at the nanoscale
G Guisbiers, L Buchaillot
Nanotechnology 19 (43), 435701, 2008
Amplified piezoelectric transduction of nanoscale motion in gallium nitride electromechanical resonators
M Faucher, B Grimbert, Y Cordier, N Baron, A Wilk, H Lahreche, P Bove, ...
Applied Physics Letters 94 (23), 2009
CVD growth of carbon nanotubes at very low pressure of acetylene
YA Kasumov, A Shailos, II Khodos, VT Volkov, VI Levashov, VN Matveev, ...
Applied Physics A 88, 687-691, 2007
Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling
P Basset, A Kaiser, B Legrand, D Collard, L Buchaillot
IEEE/ASME Transactions on Mechatronics 12 (1), 23-31, 2007
Sputtered titanium carbide thick film for high areal energy on chip carbon‐based micro‐supercapacitors
M Létiche, K Brousse, A Demortière, P Huang, B Daffos, S Pinaud, ...
Advanced Functional Materials 27 (20), 1606813, 2017
A three-dimensional shape memory alloy loop actuator
Y Nakamura, S Nakamura, L Buchaillot, H Fujita
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro …, 1997
Fracture toughness, hardness, and Young’s modulus of tantalum nanocrystalline films
G Guisbiers, E Herth, L Buchaillot, T Pardoen
Applied Physics Letters 97 (14), 2010
Post-buckling dynamic behavior of self-assembled 3D microstructures
L Buchaillot, O Millet, E Quévy, D Collard
Microsystem technologies 14, 69-78, 2008
Ultra-sensitive capacitive detection based on SGMOSFET compatible with front-end CMOS process
E Colinet, C Durand, L Duraffourg, P Audebert, G Dumas, F Casset, ...
IEEE Journal of Solid-State Circuits 44 (1), 247-257, 2008
Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids
B Legrand, AS Rollier, D Collard, L Buchaillot
Applied physics letters 88 (3), 2006
Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction
D Galayko, A Kaiser, L Buchaillot, B Legrand, D Collard, C Combi
Journal of Micromechanics and Microengineering 13 (1), 134, 2002
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