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Marcus Kaestner
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Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication
IW Rangelow, T Ivanov, A Ahmad, M Kaestner, C Lenk, IS Bozchalooi, ...
Journal of Vacuum Science & Technology B 35 (6), 2017
992017
Nanolithography by scanning probes on calixarene molecular glass resist using mix-and-match lithography
M Kaestner, M Hofer, IW Rangelow
Journal of Micro/Nanolithography, MEMS, and MOEMS 12 (3), 031111-031111, 2013
632013
Pattern-generation and pattern-transfer for single-digit nano devices
IW Rangelow, A Ahmad, T Ivanov, M Kaestner, Y Krivoshapkina, ...
Journal of Vacuum Science & Technology B 34 (6), 2016
472016
Scanning probe nanolithography on calixarene
M Kaestner, IW Rangelow
Microelectronic engineering 97, 96-99, 2012
472012
Advanced electric-field scanning probe lithography on molecular resist using active cantilever
M Kaestner, C Aydogan, T Ivanov, A Ahmad, T Angelov, A Reum, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031202-031202, 2015
462015
Scanning proximal probe lithography for sub-10 nm resolution on calix [4] resorcinarene
M Kaestner, IW Rangelow
Journal of Vacuum Science & Technology B 29 (6), 2011
452011
Scanning probes in nanostructure fabrication
M Kaestner, T Ivanov, A Schuh, A Ahmad, T Angelov, Y Krivoshapkina, ...
Journal of Vacuum Science & Technology B 32 (6), 2014
422014
Large area fast-AFM scanning with active “Quattro” cantilever arrays
A Ahmad, N Nikolov, T Angelov, T Ivanov, A Reum, I Atanasov, E Guliyev, ...
Journal of Vacuum Science & Technology B 34 (6), 2016
372016
Room-temperature single dopant atom quantum dot transistors in silicon, formed by field-emission scanning probe lithography
Z Durrani, M Jones, F Abualnaja, C Wang, M Kaestner, S Lenk, C Lenk, ...
Journal of Applied Physics 124 (14), 2018
362018
Multi-step scanning probe lithography (SPL) on calixarene with overlay alignment
M Kaestner, IW Rangelow
Alternative Lithographic Technologies IV 8323, 280-288, 2012
352012
Scanning probe lithography approach for beyond CMOS devices
Z Durrani, M Jones, M Kaestner, M Hofer, E Guliyev, A Ahmad, T Ivanov, ...
Alternative Lithographic Technologies V 8680, 237-248, 2013
322013
Scanning probe lithography on calixarene towards single-digit nanometer fabrication
M Kaestner, IW Rangelow
International Journal of Extreme Manufacturing 2 (3), 032005, 2020
302020
Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy
IW Rangelow, M Kaestner, T Ivanov, A Ahmad, S Lenk, C Lenk, E Guliyev, ...
Journal of Vacuum Science & Technology B 36 (6), 2018
302018
The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber
B Tordoff, C Hartfield, AJ Holwell, S Hiller, M Kaestner, S Kelly, J Lee, ...
Applied Microscopy 50 (1), 24, 2020
292020
Molecular glass resists for scanning probe lithography
C Neuber, A Ringk, T Kolb, F Wieberger, P Strohriegl, HW Schmidt, ...
Alternative Lithographic Technologies VI 9049, 375-383, 2014
272014
Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography
T Angelov, A Ahmad, E Guliyev, A Reum, I Atanasov, T Ivanov, V Ishchuk, ...
Journal of Vacuum Science & Technology B 34 (6), 2016
252016
Electric field scanning probe lithography on molecular glass resists using self-actuating, self-sensing cantilever
M Kaestner, K Nieradka, T Ivanov, S Lenk, Y Krivoshapkina, A Ahmad, ...
Alternative Lithographic Technologies VI 9049, 55-63, 2014
232014
0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography
N Vorbringer-Doroshovets, F Balzer, R Fuessl, E Manske, M Kaestner, ...
Alternative Lithographic Technologies V 8680, 249-258, 2013
232013
Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching
C Lenk, M Hofmann, S Lenk, M Kaestner, T Ivanov, Y Krivoshapkina, ...
Microelectronic Engineering 192, 77-82, 2018
202018
Field-emission scanning probe lithography tool for 150 mm wafer
M Holz, E Guliyev, A Ahmad, T Ivanov, A Reum, M Hofmann, C Lenk, ...
Journal of Vacuum Science & Technology B 36 (6), 2018
192018
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