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Ulrich Plachetka
Ulrich Plachetka
AMO GmbH
Verified email at amo.de
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Year
Wafer scale patterning by soft UV-nanoimprint lithography
U Plachetka, M Bender, A Fuchs, B Vratzov, T Glinsner, F Lindner, H Kurz
Microelectronic Engineering 73, 167-171, 2004
1832004
UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing
R Ji, M Hornung, MA Verschuuren, R van de Laar, J van Eekelen, ...
Microelectronic Engineering 87 (5-8), 963-967, 2010
1752010
High resolution lithography with PDMS molds
M Bender, U Plachetka, J Ran, A Fuchs, B Vratzov, H Kurz, T Glinsner, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004
1442004
Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material
N Koo, M Bender, U Plachetka, A Fuchs, T Wahlbrink, J Bolten, H Kurz
Microelectronic Engineering 84 (5-8), 904-908, 2007
1272007
Status and prospects of UV-nanoimprint technology
M Bender, A Fuchs, U Plachetka, H Kurz
Microelectronic Engineering 83 (4-9), 827-830, 2006
952006
The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography
N Koo, U Plachetka, M Otto, J Bolten, J Jeong, E Lee, H Kurz
Nanotechnology 19 (22), 225304, 2008
672008
3D structures for UV-NIL template fabrication with grayscale e-beam lithography
G Piaszenski, U Barth, A Rudzinski, A Rampe, A Fuchs, M Bender, ...
Microelectronic Engineering 84 (5-8), 945-948, 2007
472007
Ultraviolet-based nanoimprint at reduced environmental pressure
A Fuchs, M Bender, U Plachetka, U Hermanns, H Kurz
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2005
412005
Comparison of multilayer stamp concepts in UV–NIL
U Plachetka, M Bender, A Fuchs, T Wahlbrink, T Glinsner, H Kurz
Microelectronic Engineering 83 (4-9), 944-947, 2006
312006
Fabrication of inverse micro/nano pyramid structures using soft UV-NIL and wet chemical methods for residual layer removal and Si-etching
JW Kim, U Plachetka, C Moormann, H Kurz
Microelectronic engineering 110, 403-407, 2013
242013
Lithography potentials of UV-nanoimprint
A Fuchs, M Bender, U Plachetka, L Kock, N Koo, T Wahlbrink, H Kurz
Current Applied Physics 8 (6), 669-674, 2008
242008
A comparative study based on optical and electrical performance of micro-and nano-textured surfaces for silicon solar cells
R Khandelwal, U Plachetka, B Min, C Moormann, H Kurz
Microelectronic engineering 111, 220-223, 2013
222013
Fabrication of photonic ring resonator device in silicon waveguide technology using soft UV-nanoimprint lithography
U Plachetka, N Koo, T Wahlbrink, J Bolten, M Waldow, T Plotzing, M Forst, ...
IEEE Photonics Technology Letters 20 (7), 490-492, 2008
222008
Soft UV-based nanoimprint lithography for large-area imprinting applications
T Glinsner, U Plachetka, T Matthias, M Wimplinger, P Lindner
Emerging Lithographic Technologies XI 6517, 387-393, 2007
192007
Liquid transfer nanoimprint replication on non-flat surfaces for optical applications
C Moormann, N Koo, J Kim, U Plachetka, F Schlachter, C Nowak
Microelectronic engineering 100, 28-32, 2012
182012
Evaluation of an on-site surface enhanced Raman scattering sensor for benzotriazole
F Wieduwilt, C Lenth, G Ctistis, U Plachetka, M Möller, H Wackerbarth
Scientific Reports 10 (1), 8260, 2020
172020
Nanowire fin field effect transistors via UV-based nanoimprint lithography
A Fuchs, M Bender, U Plachetka, L Kock, T Wahlbrink, HDB Gottlob, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2006
162006
UV-NIL based nanostructuring of aluminum using a novel organic imprint resist demonstrated for 100 nm half-pitch wire grid polarizer
F Schlachter, J Barnett, U Plachetka, C Nowak, M Messerschmidt, ...
Microelectronic Engineering 155, 118-121, 2016
132016
Role of substrate surface morphology on the performance of graphene inks for flexible electronics
J Ruhkopf, S Sawallich, M Nagel, M Otto, U Plachetka, T Kremers, ...
ACS Applied Electronic Materials 1 (9), 1909-1916, 2019
122019
Fabrication of photonic components by nanoimprint technology within ePIXnet
U Plachetka, A Kristensen, S Scheerlinck, J Huskens, N Koo, H Kurz
Microelectronic engineering 85 (5-6), 886-889, 2008
122008
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