Mario Birkholz
Mario Birkholz
Professor at IHP - Leibniz-Institut für innovative Mikroelektronik, and TU Berlin
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Cited by
Cited by
Thin film analysis by X-ray scattering
M Birkholz, PF Fewster, C Genzel
Wiley-VCH, 2006
Sulfur deficiency in iron pyrite (FeS 2− x) and its consequences for band-structure models
M Birkholz, S Fiechter, A Hartmann, H Tributsch
Physical Review B 43 (14), 11926, 1991
Photoactive thin film semiconducting iron pyrite prepared by sulfurization of iron oxides
G Smestad, A Ennaoui, S Fiechter, H Tributsch, WK Hofmann, M Birkholz, ...
Solar Energy Materials 20 (3), 149-165, 1990
Ultrafast carrier trapping in microcrystalline silicon observed in optical pump–terahertz probe measurements
P Uhd Jepsen, W Schairer, IH Libon, U Lemmer, NE Hecker, M Birkholz, ...
Applied Physics Letters 79 (9), 1291-1293, 2001
Formation of semiconducting iron pyrite by spray pyrolysis
G Smestad, A Da Silva, H Tributsch, S Fiechter, M Kunst, N Meziani, ...
Solar Energy Materials 18 (5), 299-313, 1989
Structure-function relationship between preferred orientation of crystallites and electrical resistivity in thin polycrystalline ZnO: Al films
M Birkholz, B Selle, F Fenske, W Fuhs
Physical Review B 68 (20), 205414, 2003
Sputtering of thin pyrite films
M Birkholz, D Lichtenberger, C Höpfner, S Fiechter
Solar Energy Materials and Solar Cells 27 (3), 243-251, 1992
The microstructure and stoichiometry of pyrite FeS2−x
S Fiechter, M Birkholz, A Hartmann, P Dulski, M Giersig, H Tributsch, ...
Journal of materials research 7, 1829-1838, 1992
Evolution of structure in thin microcrystalline silicon films grown by electron-cyclotron resonance chemical vapor deposition
M Birkholz, B Selle, E Conrad, K Lips, W Fuhs
Journal of Applied Physics 88 (7), 4376-4379, 2000
Nanocomposite layers of ceramic oxides and metals prepared by reactive gas-flow sputtering
M Birkholz, U Albers, T Jung
Surface and Coatings Technology 179 (2-3), 279-285, 2004
BEOL embedded RF-MEMS switch for mm-wave applications
M Kaynak, KE Ehwald, J Drews, R Scholz, F Korndörfer, D Knoll, B Tillack, ...
2009 IEEE International Electron Devices Meeting (IEDM), 1-4, 2009
Corrosion-resistant metal layers from a CMOS process for bioelectronic applications
M Birkholz, KE Ehwald, D Wolansky, I Costina, C Baristiran-Kaynak, ...
Surface and Coatings Technology 204 (12-13), 2055-2059, 2010
Ultrathin TiN membranes as a technology platform for CMOS‐integrated MEMS and BioMEMS devices
M Birkholz, KE Ehwald, P Kulse, J Drews, M Fröhlich, U Haak, M Kaynak, ...
Advanced Functional Materials 21 (9), 1652-1656, 2011
Crystal-field induced dipoles in heteropolar crystals II: Physical significance
M Birkholz
Zeitschrift für Physik B Condensed Matter 96, 333-340, 1995
X-ray diffraction study on residual stress and preferred orientation in thin titanium films subjected to a high ion flux during deposition
M Birkholz, C Genzel, T Jung
Journal of Applied Physics 96 (12), 7202-7211, 2004
Amorphous-crystalline phase transition during the growth of thin films: The case of microcrystalline silicon
M Birkholz, B Selle, W Fuhs, S Christiansen, HP Strunk, R Reich
Physical Review B 64 (8), 085402, 2001
Spiral microfluidic devices for cell separation and sorting in bioprocesses
N Herrmann, P Neubauer, M Birkholz
Biomicrofluidics 13 (6), 2019
Self-organized pattern formation of biomolecules at silicon surfaces: Intended application of a dislocation network
M Kittler, X Yu, OF Vyvenko, M Birkholz, W Seifert, M Reiche, T Wilhelm, ...
Materials Science and Engineering: C 26 (5-7), 902-910, 2006
Technology modules from micro‐and nano‐electronics for the life sciences
M Birkholz, A Mai, C Wenger, C Meliani, R Scholz
Wiley Interdisciplinary Reviews: Nanomedicine and Nanobiotechnology 8 (3 …, 2016
Low-temperature electron-paramagnetic-resonance study of extrinsic and intrinsic defects in
M Birkholz, P Kanschat, T Weiss, M Czerwensky, K Lips
Physical review B 59 (19), 12268, 1999
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