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Vladimir Samara
Vladimir Samara
Verified email at nd.edu
Title
Cited by
Cited by
Year
Secondary electron emission of carbonaceous dust particles
I Stefanović, J Berndt, D Marić, V Šamara, M Radmilović-Radjenović, ...
Physical Review E 74 (2), 026406, 2006
542006
Effect of power modulation on properties of pulsed capacitively coupled radiofrequency discharges
V Šamara, MD Bowden, NSJ Braithwaite
Journal of Physics D: Applied Physics 43 (12), 124017, 2010
352010
Etching of low-k materials for microelectronics applications by means of a N2/H2 plasma: modeling and experimental investigation
K Van Laer, S Tinck, V Samara, JF de Marneffe, A Bogaerts
Plasma Sources Science and Technology 22 (2), 025011, 2013
232013
A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring
V Šamara, JP Booth, JF de Marneffe, AP Milenin, M Brouri, W Boullart
Plasma Sources Science and Technology 21 (6), 065004, 2012
222012
Influence of O2 or H2O in a plasma jet and its environment on plasma electrical and biochemical performances
ER Adhikari, V Samara, S Ptasinska
Journal of Physics D: Applied Physics 51 (18), 185202, 2018
212018
Experimental and theoretical study of RF capacitively coupled plasma in Ar–CF4–CF3I mixtures
OV Proshina, TV Rakhimova, DV Lopaev, V Šamara, MR Baklanov, ...
Plasma Sources Science and Technology 24 (5), 055006, 2015
212015
Vacuum ultra-violet emission of CF4 and CF3I containing plasmas and Their effect on low-k materials
Z el Otell, V Šamara, A Zotovich, T Hansen, JF de Marneffe, MR Baklanov
Journal of Physics D: Applied Physics 48 (39), 395202, 2015
182015
Influence of the ion bombardment of O 2 plasmas on low-k materials
P Verdonck, V Šamara, A Goodyear, A Ferchichi, E Van Besien, ...
Thin Solid Films 520 (1), 464-468, 2011
142011
Total yield of reactive species originating from an atmospheric pressure plasma jet in real time
ER Adhikari, V Samara, S Ptasinska
Biological chemistry 400 (1), 93-100, 2018
112018
Plasma probe and method for plasma diagnostics
V Samara, JF De Marneffe, W Boullart
US Patent App. 13/464,679, 2012
92012
Modulation of microwave resonance probes
V Šamara, MD Bowden, NSJ Braithwaite
Plasma Sources Science and Technology 21 (2), 024011, 2012
72012
Acoustic characterization of atmospheric-pressure dielectric barrier discharge plasma jets
V Samara, Y Sutton, N Braithwaite, S Ptasinska
The European Physical Journal D 74 (8), 1-8, 2020
52020
Interferometry of plasma bursts in helium atmospheric-pressure plasma jets
V Samara, S Ptasinska
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 36 (4 …, 2018
32018
Emission coefficients in helium
Ž Nikitović, A Strinić, V Šamara, G Malović, Z Petrović
Acta Chim. Slov 52, 463-466, 2005
32005
Method and apparatus for real-time monitoring of plasma etch uniformity
V Samara, J De Marneffe
US Patent App. 14/958,771, 2015
12015
In-situ monitoring of etch uniformity using plasma emission interferometry
V Samara, JF de Marneffe, Z el Otell, DJ Economou
Journal of Vacuum Science & Technology B 33 (3), 031206, 2015
12015
In situ Measurements of Total Yield of Species Originating from Plasma Jets.
E Adhikari, V Samara, K Jammeh, S Ptasinska
APS Meeting Abstracts, 2018
2018
Interaction Of Atmospheric Pressure Plasma Jet With Helium Flow
V Samara, S Ptasinska
2017 IEEE International Conference on Plasma Science (ICOPS), 1-1, 2017
2017
Development of a novel wafer-probe for in situ measurements of thin film properties
Z el Otell, D Marinov, V Šamara, MD Bowden, JF de Marneffe, P Verdonck, ...
Plasma Sources Science and Technology 24 (3), 032002, 2015
2015
2D micro-chamber for DC plasma working at low power
V Rochus, V Samara, B Vereecke, P Soussan, B Onsia, X Rottenberg
Thermal, mechanical and multi-physics simulation and experiments in …, 2014
2014
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