Secondary electron emission of carbonaceous dust particles I Stefanović, J Berndt, D Marić, V Šamara, M Radmilović-Radjenović, ... Physical Review E 74 (2), 026406, 2006 | 54 | 2006 |
Effect of power modulation on properties of pulsed capacitively coupled radiofrequency discharges V Šamara, MD Bowden, NSJ Braithwaite Journal of Physics D: Applied Physics 43 (12), 124017, 2010 | 35 | 2010 |
Etching of low-k materials for microelectronics applications by means of a N2/H2 plasma: modeling and experimental investigation K Van Laer, S Tinck, V Samara, JF de Marneffe, A Bogaerts Plasma Sources Science and Technology 22 (2), 025011, 2013 | 23 | 2013 |
A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring V Šamara, JP Booth, JF de Marneffe, AP Milenin, M Brouri, W Boullart Plasma Sources Science and Technology 21 (6), 065004, 2012 | 22 | 2012 |
Influence of O2 or H2O in a plasma jet and its environment on plasma electrical and biochemical performances ER Adhikari, V Samara, S Ptasinska Journal of Physics D: Applied Physics 51 (18), 185202, 2018 | 21 | 2018 |
Experimental and theoretical study of RF capacitively coupled plasma in Ar–CF4–CF3I mixtures OV Proshina, TV Rakhimova, DV Lopaev, V Šamara, MR Baklanov, ... Plasma Sources Science and Technology 24 (5), 055006, 2015 | 21 | 2015 |
Vacuum ultra-violet emission of CF4 and CF3I containing plasmas and Their effect on low-k materials Z el Otell, V Šamara, A Zotovich, T Hansen, JF de Marneffe, MR Baklanov Journal of Physics D: Applied Physics 48 (39), 395202, 2015 | 18 | 2015 |
Influence of the ion bombardment of O 2 plasmas on low-k materials P Verdonck, V Šamara, A Goodyear, A Ferchichi, E Van Besien, ... Thin Solid Films 520 (1), 464-468, 2011 | 14 | 2011 |
Total yield of reactive species originating from an atmospheric pressure plasma jet in real time ER Adhikari, V Samara, S Ptasinska Biological chemistry 400 (1), 93-100, 2018 | 11 | 2018 |
Plasma probe and method for plasma diagnostics V Samara, JF De Marneffe, W Boullart US Patent App. 13/464,679, 2012 | 9 | 2012 |
Modulation of microwave resonance probes V Šamara, MD Bowden, NSJ Braithwaite Plasma Sources Science and Technology 21 (2), 024011, 2012 | 7 | 2012 |
Acoustic characterization of atmospheric-pressure dielectric barrier discharge plasma jets V Samara, Y Sutton, N Braithwaite, S Ptasinska The European Physical Journal D 74 (8), 1-8, 2020 | 5 | 2020 |
Interferometry of plasma bursts in helium atmospheric-pressure plasma jets V Samara, S Ptasinska Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 36 (4 …, 2018 | 3 | 2018 |
Emission coefficients in helium Ž Nikitović, A Strinić, V Šamara, G Malović, Z Petrović Acta Chim. Slov 52, 463-466, 2005 | 3 | 2005 |
Method and apparatus for real-time monitoring of plasma etch uniformity V Samara, J De Marneffe US Patent App. 14/958,771, 2015 | 1 | 2015 |
In-situ monitoring of etch uniformity using plasma emission interferometry V Samara, JF de Marneffe, Z el Otell, DJ Economou Journal of Vacuum Science & Technology B 33 (3), 031206, 2015 | 1 | 2015 |
In situ Measurements of Total Yield of Species Originating from Plasma Jets. E Adhikari, V Samara, K Jammeh, S Ptasinska APS Meeting Abstracts, 2018 | | 2018 |
Interaction Of Atmospheric Pressure Plasma Jet With Helium Flow V Samara, S Ptasinska 2017 IEEE International Conference on Plasma Science (ICOPS), 1-1, 2017 | | 2017 |
Development of a novel wafer-probe for in situ measurements of thin film properties Z el Otell, D Marinov, V Šamara, MD Bowden, JF de Marneffe, P Verdonck, ... Plasma Sources Science and Technology 24 (3), 032002, 2015 | | 2015 |
2D micro-chamber for DC plasma working at low power V Rochus, V Samara, B Vereecke, P Soussan, B Onsia, X Rottenberg Thermal, mechanical and multi-physics simulation and experiments in …, 2014 | | 2014 |