Sang-Joon Park
Sang-Joon Park
Principal Engineer, Samsung Electronics
Verified email at
Cited by
Cited by
Porous anodic aluminum oxide: anodization and templated synthesis of functional nanostructures
W Lee, SJ Park
Chemical Reviews 114, 7487, 2014
In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
SJ Park, JP Lee, JS Jang, H Rhu, H Yu, BY You, CS Kim, KJ Kim, YJ Cho, ...
Nanotechnology 24 (29), 295202, 2013
Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
SJ Park, WH Kim, WJ Maeng, H Kim
Microelectronic engineering 85 (1), 39-44, 2008
Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition
WH Kim, SJ Park, JY Son, H Kim
Nanotechnology 19 (4), 045302, 2008
In Situ Determination of the Pore Opening Point during Wet-Chemical Etching of the Barrier Layer of Porous Anodic Aluminum Oxide: Nonuniform Impurity …
H Han, SJ Park, JS Jang, H Ryu, KJ Kim, S Baik, W Lee
ACS Applied Materials & Interfaces 5 (8), 3441-3448, 2013
Effect oxygen exposure on the quality of atomic layer deposition of ruthenium from bis (cyclopentadienyl) ruthenium and oxygen
SJ Park, WH Kim, WJ Maeng, YS Yang, CG Park, H Kim, KN Lee, ...
Thin Solid Films 516 (21), 7345-7349, 2008
Atomic layer deposition of ruthenium and ruthenium-oxide thin films by using a Ru (EtCp) 2 precursor and oxygen gas
WH Kim, SJ Park, H Kim
Journal of the Korean Physical Society 55 (1), 32-37, 2009
Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
WJ Maeng, SJ Park, H Kim
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2006
Adsorption in alumina pores open at one and at both ends
L Bruschi, G Mistura, PTM Nguyen, DD Do, D Nicholson, SJ Park, W Lee
Nanoscale 7, 2587, 2015
Local probing of electrochemically induced negative differential resistance in TiO2 memristive materials
Y Kim, JH Jang, SJ Park, S Jesse, L Donovan, AY Borisevich, W Lee, ...
Nanotechnology 24 (8), 085702, 2013
A versatile ultra-thin Au nanomesh from a reusable anodic aluminium oxide (AAO) membrane
SJ Park, H Han, H Rhu, S Baik, W Lee
Journal of Materials Chemistry C 1 (34), 5330-5335, 2013
Supporting Information: Adsorption in alumina pores open at one and at both ends
L Bruschi, G Mistura, SJ Park, W Lee
Electronic Supplementary Material (ESI) for Nanoscale, 2014
Adsorption of argon on mesoporous anodic alumina
L Bruschi, G Mistura, SJ Park, W Lee
Adsorption 20, 889, 2014
Nanosculpting of complex oxides by massive ionic transfer
YK Daehee Seol, Stephen Jesse, Sang-Joon Park, Woo Lee, Sergei V Kalinin
Nanotechnology 27 (50), 505703, 2016
Facile fabrication of ordered Si1− xGex nanostructures via hybrid process of selective epitaxial growth (SEG) and self-assembled nanotemplates
SJ Park, I Hwang, HS Lee, S Baik, H Kim
Journal of alloys and compounds 536, 166-172, 2012
Selective epitaxial growth of Si1− xGex films via the alternating gas supply of Si2H6, GeH4, and Cl2: Effects of Cl2 exposure
SJ Park, S Baik, H Kim
Materials Letters 88, 89-92, 2012
SiGe nanostructure fabrication through selective epitaxial growth using self-assembled nanotemplates
SJ Park, IC Hwang, HS Lee, JY Son, H Kim
IOP Conference Series: Materials Science and Engineering 6 (1), 012019, 2009
Nanomaterial fabrication by Ru atomic layer deposition on anodic aluminum oxide nanotemplate
WH Kim, SJ Park, H Kim
2006 IEEE Nanotechnology Materials and Devices Conference 1, 636-637, 2006
The system can't perform the operation now. Try again later.
Articles 1–18