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Ingi Kim
Ingi Kim
Mechatronics Research, Samsung Electronics
Dirección de correo verificada de samsung.com
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Valley anisotropy in elastic metamaterials
S Li, I Kim, S Iwamoto, J Zang, J Yang
Physical Review B 100 (19), 195102, 2019
282019
Topologically protected elastic waves in one-dimensional phononic crystals of continuous media
I Kim, S Iwamoto, Y Arakawa
Applied Physics Express 11 (1), 017201, 2017
282017
Design of GaAs-based valley phononic crystals with multiple complete phononic bandgaps at ultra-high frequency
I Kim, Y Arakawa, S Iwamoto
Applied Physics Express 12 (4), 047001, 2019
212019
Visible upconversion luminescence of doped bulk silicon for a multimodal wafer metrology
BI Afinogenov, AN Sofronov, IM Antropov, NR Filatov, AS Medvedev, ...
Optics Letters 46 (13), 3071-3074, 2021
32021
High-speed wafer magnetic field inspection for semiconductor manufacturing
S Ueyama, J Kim, M Numata, W Kim, I Kim, M Lee
Metrology, Inspection, and Process Control XXXVI 12053, 142-150, 2022
22022
Enhanced photoelastic modulation in silica phononic crystal cavities
I Kim, S Iwamoto, Y Arakawa
Japanese Journal of Applied Physics 57 (4), 042002, 2018
12018
Design of quasi-one-dimensional phononic crystal cavity for efficient photoelastic modulation
I Kim, S Iwamoto, Y Arakawa
Japanese Journal of Applied Physics 55 (8S3), 08RD02, 2016
12016
Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system
E Jeang, B Afinogenov, S Bae, W Joo, M Riabko, A Medvedev, ...
US Patent App. 18/495,618, 2024
2024
Method of extracting properties of a layer on a wafer
B Inkeun, P Suhwan, I Jeon, N Koo, KIM Ingi, J Kim, J Park, JUN Sunhong
US Patent App. 18/202,650, 2024
2024
Non-contact measurement of dopant depth profile with terahertz emission spectroscopy
K Suzuki, F Murakami, I Baek, M Numata, I Kim, R Sungyoon, S Ueyama, ...
Metrology, Inspection, and Process Control XXXVIII 12955, 12-22, 2024
2024
Polarization measuring device and method of fabricating semiconductor device using the same
KIM Ingi, M Seo, S Bae, A Okubo, J Lee, E Jeang
US Patent 11,946,809, 2024
2024
Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system
E Jeang, B Afinogenov, S Bae, W Joo, M Riabko, A Medvedev, ...
US Patent 11,823,961, 2023
2023
Wafer inspection apparatus and system including the same
K Han, KIM Ingi, S Bae, J Lee, M Seo, M Ko, YJ Lee, T Kim, S Lee
US Patent 11,823,927, 2023
2023
Scanning Magneto-optic Kerr effect microscope for inspection of MRAM manufacturing
M Numata, I Kim, K Suzuki, S Ueyama, J Kim, W Kim, M Lee
IEEE Transactions on Magnetics, 2023
2023
Characterization of interface charge traps in PE-TEOS and HDP oxide with different annealing temperatures using time-dependent second-harmonic generation
I Kim, S Park, M Seo, S Jun, S Ryu, S Bae, N Koo, Y Yang
Nonlinear Optics and Applications XIII 12569, 9-12, 2023
2023
Inspection device
S Ueyama, KIM Ingi, H Sekiya, T Onishi
US Patent App. 18/047,820, 2023
2023
Particle inspection device based on spatial modulation method and particle inspection method using the particle inspection device
S Bae, B Afinogenov, M Riabko, A Medvedev, A Shorokhov, A Sofronov, ...
US Patent App. 17/215,185, 2022
2022
Visible upconversion photoluminescence of bulk silicon and mesoscale silicon nanoparticles
BI Afinogenov, AS Medvedev, IM Antropov, NR Filatov, AN Sofronov, ...
Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices …, 2020
2020
Single nanoparticle detection in the far field by nonlinear optical method
EH Jeang, B Afinogenov, S Bae, TH Kim, I Kim, K Han, A Ohkubo, SM Lee, ...
Nonlinear Optics and its Applications 2020 11358, 1135802, 2020
2020
Investigation of on-chip excitation of edge-states in GaAs valley phononic crystals by using interdigital electrodes
Z Sun, I Kim, S Iwamoto
JSAP Annual Meetings Extended Abstracts The 80th JSAP Autumn Meeting 2019 …, 2019
2019
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Artículos 1–20