Pere Roca i Cabarrocas
Pere Roca i Cabarrocas
LPICM, CNRS, Ecole Polytechnique, and IPVF
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A fully automated hot‐wall multiplasma‐monochamber reactor for thin film deposition
P Roca i Cabarrocas, JB Chévrier, J Huc, A Lloret, JY Parey, JPM Schmitt
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 9 (4 …, 1991
Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements
AF i Morral, PR i Cabarrocas, C Clerc
Physical Review B 69 (12), 125307, 2004
Influence of Cu as a catalyst on the properties of silicon nanowires synthesized by the vapour–solid–solid mechanism
J Arbiol, B Kalache, PR i Cabarrocas, JR Morante, AF i Morral
Nanotechnology 18 (30), 305606, 2007
Substrate selectivity in the formation of microcrystalline silicon: Mechanisms and technological consequences
P Roca i Cabarrocas, N Layadi, T Heitz, B Drévillon, I Solomon
Applied Physics Letters 66 (26), 3609-3611, 1995
Real-time spectroscopic ellipsometry study of the growth of amorphous and microcrystalline silicon thin films prepared by alternating silicon deposition and hydrogen plasma …
N Layadi, PR i Cabarrocas, B Drévillon, I Solomon
Physical Review B 52 (7), 5136, 1995
High efficiency and stable hydrogenated amorphous silicon radial junction solar cells built on VLS-grown silicon nanowires
S Misra, L Yu, M Foldyna, PR i Cabarrocas
Solar Energy Materials and Solar Cells 118, 90-95, 2013
Plasma enhanced chemical vapor deposition of amorphous, polymorphous and microcrystalline silicon films
PR i Cabarrocas
Journal of non-crystalline solids 266, 31-37, 2000
Plasma-enhanced low temperature growth of silicon nanowires and hierarchical structures by using tin and indium catalysts
L Yu, B O’Donnell, PJ Alet, S Conesa-Boj, F Peiro, J Arbiol, ...
Nanotechnology 20 (22), 225604, 2009
Ion bombardment effects on microcrystalline silicon growth mechanisms and on the film properties
B Kalache, AI Kosarev, R Vanderhaghen, PR i Cabarrocas
Journal of Applied physics 93 (2), 1262-1273, 2003
Contribution of ions to the growth of amorphous, polymorphous, and microcrystalline silicon thin films
EAG Hamers, A Fontcuberta i Morral, C Niikura, R Brenot, ...
Journal of Applied Physics 88 (6), 3674-3688, 2000
Experimental evidence for nanoparticle deposition in continuous argon–silane plasmas: Effects of silicon nanoparticles on film properties
P Roca i Cabarrocas, P Gay, A Hadjadj
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (2 …, 1996
Plasma texturing for silicon solar cells: From pyramids to inverted pyramids-like structures
M Moreno, D Daineka, PR i Cabarrocas
Solar Energy Materials and Solar Cells 94 (5), 733-737, 2010
Incorporation and redistribution of impurities into silicon nanowires during metal-particle-assisted growth
W Chen, L Yu, S Misra, Z Fan, P Pareige, G Patriarche, S Bouchoule, ...
Nature communications 5 (1), 4134, 2014
A-Si: H deposition from SiH4 and Si2H6 RF-discharges: Pressure and temperature dependence of film growth in relation to α-γ discharge transition
J Perrin, PR i Cabarrocas, B Allain, JM Friedt
Japanese journal of applied physics 27 (11R), 2041, 1988
Midgap density of states in hydrogenated polymorphous silicon
M Meaudre, R Meaudre, R Butté, S Vignoli, C Longeaud, JP Kleider, ...
Journal of Applied Physics 86 (2), 946-950, 1999
Growth and optoelectronic properties of polymorphous silicon thin films
PR i Cabarrocas, AF i Morral, Y Poissant
Thin Solid Films 403, 39-46, 2002
Atomic structure of the nanocrystalline Si particles appearing in nanostructured Si thin films produced in low-temperature radiofrequency plasmas
G Viera, M Mikikian, E Bertran, PR Cabarrocas, L Boufendi
Journal of Applied Physics 92 (8), 4684-4694, 2002
Stable microcrystalline silicon thin-film transistors produced by the layer-by-layer technique
P Roca i Cabarrocas, R Brenot, P Bulkin, R Vanderhaghen, B Drévillon, ...
Journal of Applied Physics 86 (12), 7079-7082, 1999
In situ investigation of the growth of rf glow‐discharge deposited amorphous germanium and silicon films
AM Antoine, B Drevillon, P Roca i Cabarrocas
Journal of applied physics 61 (7), 2501-2508, 1987
A review on plasma-assisted VLS synthesis of silicon nanowires and radial junction solar cells
S Misra, L Yu, W Chen, M Foldyna, PR i Cabarrocas
Journal of physics D: Applied physics 47 (39), 393001, 2014
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