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Brett B. Lewis
Brett B. Lewis
Carl Zeiss SMT, LLC
Verified email at zeiss.com
Title
Cited by
Cited by
Year
Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition
JD Fowlkes, R Winkler, BB Lewis, MG Stanford, H Plank, PD Rack
ACS nano 10 (6), 6163-6172, 2016
1432016
Direct-write 3D nanoprinting of plasmonic structures
R Winkler, FP Schmidt, U Haselmann, JD Fowlkes, BB Lewis, ...
ACS applied materials & interfaces 9 (9), 8233-8240, 2017
1362017
Electron-beam-assisted oxygen purification at low temperatures for electron-beam-induced pt deposits: towards pure and high-fidelity nanostructures
H Plank, JH Noh, JD Fowlkes, K Lester, BB Lewis, PD Rack
ACS applied materials & interfaces 6 (2), 1018-1024, 2014
812014
High-fidelity 3D-nanoprinting via focused electron beams: computer-aided design (3BID)
JD Fowlkes, R Winkler, BB Lewis, A Fernandez-Pacheco, L Skoric, ...
ACS Applied Nano Materials 1 (3), 1028-1041, 2018
612018
Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams
MG Stanford, BB Lewis, K Mahady, JD Fowlkes, PD Rack
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2017
562017
Purification of nanoscale electron-beam-induced platinum deposits via a pulsed laser-induced oxidation reaction
MG Stanford, BB Lewis, JH Noh, JD Fowlkes, NA Roberts, H Plank, ...
ACS applied materials & interfaces 6 (23), 21256-21263, 2014
492014
High-fidelity 3D-nanoprinting via focused electron beams: Growth fundamentals
R Winkler, BB Lewis, JD Fowlkes, PD Rack, H Plank
ACS Applied Nano Materials 1 (3), 1014-1027, 2018
472018
Nanoscale electron beam-induced deposition and purification of ruthenium for extreme ultraviolet lithography mask repair
JH Noh, MG Stanford, BB Lewis, JD Fowlkes, H Plank, PD Rack
Applied Physics A 117, 1705-1713, 2014
452014
In situ mitigation of subsurface and peripheral focused ion beam damage via simultaneous pulsed laser heating
MG Stanford, BB Lewis, V Iberi, JD Fowlkes, S Tan, R Livengood, ...
Small 12 (13), 1779-1787, 2016
342016
Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition
BB Lewis, MG Stanford, JD Fowlkes, K Lester, H Plank, PD Rack
Beilstein journal of nanotechnology 6 (1), 907-918, 2015
302015
3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity
BB Lewis, R Winkler, X Sang, PR Pudasaini, MG Stanford, H Plank, ...
Beilstein Journal of Nanotechnology 8, 801-812, 2017
252017
Laser-Assisted Focused He+ Ion Beam Induced Etching with and without XeF2 Gas Assist
MG Stanford, K Mahady, BB Lewis, JD Fowlkes, S Tan, R Livengood, ...
ACS applied materials & interfaces 8 (42), 29155-29162, 2016
252016
Inert gas enhanced laser-assisted purification of platinum electron-beam-induced deposits
MG Stanford, BB Lewis, JH Noh, JD Fowlkes, PD Rack
ACS applied materials & interfaces 7 (35), 19579-19588, 2015
242015
Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition
BB Lewis, BA Mound, B Srijanto, JD Fowlkes, GM Pharr, PD Rack
Nanoscale 9 (42), 16349-16356, 2017
222017
Electron nanoprobe induced oxidation: a simulation of direct-write purification
JD Fowlkes, B Geier, BB Lewis, PD Rack, MG Stanford, R Winkler, ...
Physical Chemistry Chemical Physics 17 (28), 18294-18304, 2015
212015
Direct write of 3D nanoscale mesh objects with platinum precursor via focused helium ion beam induced deposition
A Belianinov, MJ Burch, A Ievlev, S Kim, MG Stanford, K Mahady, ...
Micromachines 11 (5), 527, 2020
182020
Evaluation of mask repair strategies via focused electron, helium, and neon beam induced processing for EUV applications
CM Gonzalez, W Slingenbergh, R Timilsina, JH Noh, MG Stanford, ...
Extreme Ultraviolet (EUV) Lithography V 9048, 135-141, 2014
172014
Pulsed Laser-Assisted Focused Electron-Beam-Induced Etching of Titanium with XeF2: Enhanced Reaction Rate and Precursor Transport
JH Noh, JD Fowlkes, R Timilsina, MG Stanford, BB Lewis, PD Rack
ACS applied materials & interfaces 7 (7), 4179-4184, 2015
112015
NanoFab SIMS: high spatial resolution imaging and analysis using inert-gas ion beams
S Sijbrandij, A Lombardi, A Sireuil, F Khanom, B Lewis, C Guillermier, ...
Microscopy Today 27 (3), 22-27, 2019
52019
NanoFab with SIMS-Recent Results from the BAM-L200 Analytical Standard and Semiconductor Samples
B Lewis, F Khanom, J Notte
Microscopy and Microanalysis 24 (S1), 850-851, 2018
32018
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